1D high precision interferometer-controlled comparator
Saulius Kaušinis, Aurimas Jakštas, J Fluegge, Rimantas Barauskas.
Santrauka
A measurement stage for characterization and calibration of a new precision incremental encoder for measuring legths up to 1 mm has been developed. An exposed linear encoder with a phase grating applied to a carrier of glass ceramics Zerodur has been used as a reference system
