Parametric sensitivity of MEMS-gyro

Abstract

The paper presents the finite element (FE) modeling approach to sensitivity analysis of MEMS-based gyros. The FE model is employed to both studying the system?s dynamical properties and appreciation of the sensitivity of these to various influencing effects. The sensitivity functions have been obtained for adjusting the geometric parameters of the piezoelectric transducers in order to achieve the desired values of natural frequencies. Results are presented in terms of sensor performance characteristics for various design parameters and modes of operation. The modeling assumptions adopted are tested experimentally on a cantilever-shape test vehicle.