Investigation of dynamic properties of line scale calibration systems
The paper addresses the error-related problems specific to line scale calibration in dynamic mode of operation that are caused primarily by geometrical and thermal deviations of the calibration system components. A new 3D finite element model has been developed in order to both investigate thermo-mechanical processes in the comparator structure and evaluate possible temperature influence on geometrical dimensions of the line scale. An interferometer-controlled comparator setup with a moving microscope has been designed to evaluate the performance of the long scale calibration process.
Miestas | Rio de Jeneiro |
Leidėjas | IMEKO |
Publikacija | IMEKO XVIII World Congress and IV Brazilian Congress of Metrology [elektroninis išteklius], September 17-22, 2006, Rio de Jeneiro, Brazil, 2006, p. [1-6] |