1D high precision interferometer-controlled comparator
A measurement stage for characterization and calibration of a new precision incremental encoder for measuring legths up to 1 mm has been developed. An exposed linear encoder with a phase grating applied to a carrier of glass ceramics Zerodur has been used as a reference system
| Miestas | Tallinn |
| Leidėjas | Tallinn University of Technology, 2004 |
| Publikacija | BEC 2004 : proceedings of the 9th Biennial Baltic Electronics Conference, October 3-6, 2004, Tallinn, Estonia, p. 195-198 |
| ISBN | 9985594622 |
| Duomenų bazė | ISI Proceedings |